| 8075732 |
EUV collector debris management |
Richard L. Sandstrom, Igor V. Fomenkov, Alexander I. Ershov, William Oldham, William Marx +1 more |
2011-12-13 |
| 8000212 |
Metrology for extreme ultraviolet light source |
Vahan Senekerimyan, Nam-hyong Kim, Robert A. Bergstedt, Igor V. Fomenkov |
2011-08-16 |
| 7999915 |
Laser system |
Alexander I. Ershov, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt, Ivan Lalovic |
2011-08-16 |
| 7995637 |
Gas discharge laser chamber |
Richard L. Sandstrom, Daniel J. W. Brown, Bryan Moosman, Tae Hoon Chung, Thomas Patrick Duffey +2 more |
2011-08-09 |
| RE42588 |
Control system for a two chamber gas discharge laser system |
John P. Fallon, Richard L. Sandstrom, Alexander I. Ershov, Toshihiko Ishihara, John Meisner +4 more |
2011-08-02 |
| 7920616 |
Laser system |
Daniel J. W. Brown, Richard L. Sandstrom |
2011-04-05 |
| 7899095 |
Laser lithography system with improved bandwidth control |
— |
2011-03-01 |
| 7884303 |
Laser thin film poly-silicon annealing optical system |
Palash P. Das, Russell Hudyma, Michael Thomas |
2011-02-08 |
| 7885309 |
Laser system |
Alexander I. Ershov, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt, Richard L. Sandstrom +1 more |
2011-02-08 |