Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999915 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Ivan Lalovic | 2011-08-16 |
| 8000212 | Metrology for extreme ultraviolet light source | Vahan Senekerimyan, Nam-hyong Kim, Igor V. Fomenkov, William N. Partlo | 2011-08-16 |
| 7885309 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Richard L. Sandstrom +1 more | 2011-02-08 |