| 8075732 |
EUV collector debris management |
William N. Partlo, Richard L. Sandstrom, Alexander I. Ershov, William Oldham, William Marx +1 more |
2011-12-13 |
| 8035092 |
Laser produced plasma EUV light source |
Alexander N. Bykanov, Norbert Bowering, Alexander I. Ershov, Oleh Khodykin |
2011-10-11 |
| 8017924 |
Drive laser delivery systems for EUV light source |
Alexander N. Bykanov, Alexander I. Ershov |
2011-09-13 |
| 7999915 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Robert A. Bergstedt, Ivan Lalovic |
2011-08-16 |
| 8000212 |
Metrology for extreme ultraviolet light source |
Vahan Senekerimyan, Nam-hyong Kim, Robert A. Bergstedt, William N. Partlo |
2011-08-16 |
| 7928417 |
LPP EUV light source drive laser system |
Alexander I. Ershov, Alexander N. Bykanov, Oleh Khodykin |
2011-04-19 |
| 7928416 |
Laser produced plasma EUV light source |
— |
2011-04-19 |
| 7885309 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Robert A. Bergstedt, Richard L. Sandstrom +1 more |
2011-02-08 |
| 7872245 |
Systems and methods for target material delivery in a laser produced plasma EUV light source |
Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Alexander I. Ershov +2 more |
2011-01-18 |