Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035092 | Laser produced plasma EUV light source | Norbert Bowering, Igor V. Fomenkov, Alexander I. Ershov, Oleh Khodykin | 2011-10-11 |
| 8017924 | Drive laser delivery systems for EUV light source | Igor V. Fomenkov, Alexander I. Ershov | 2011-09-13 |
| 7928417 | LPP EUV light source drive laser system | Alexander I. Ershov, Oleh Khodykin, Igor V. Fomenkov | 2011-04-19 |
| 7916388 | Drive laser for EUV light source | — | 2011-03-29 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Norbert Bowering, David C. Brandt, Alexander I. Ershov, Rodney D. Simmons +2 more | 2011-01-18 |