Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035092 | Laser produced plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, Alexander I. Ershov, Oleh Khodykin | 2011-10-11 |
| 7960701 | EUV light source components and methods for producing, using and refurbishing same | Oleh Khodykin | 2011-06-14 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander N. Bykanov, David C. Brandt, Alexander I. Ershov, Rodney D. Simmons +2 more | 2011-01-18 |