Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8061923 | Blind motorized coupling arrangements for coupling UV light source subsystem and scanner subsystem in a UV lithography system and methods therefor | — | 2011-11-22 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Alexander I. Ershov +2 more | 2011-01-18 |