Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075732 | EUV collector debris management | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, Alexander I. Ershov, William Marx +1 more | 2011-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075732 | EUV collector debris management | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, Alexander I. Ershov, William Marx +1 more | 2011-12-13 |