Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075732 | EUV collector debris management | William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, William Oldham, William Marx +1 more | 2011-12-13 |
| 8014432 | Regenerative ring resonator | Hong Ye, Slava Rokitski, Daniel J. W. Brown, Robert Jay Rafac | 2011-09-06 |
| 7995637 | Gas discharge laser chamber | William N. Partlo, Daniel J. W. Brown, Bryan Moosman, Tae Hoon Chung, Thomas Patrick Duffey +2 more | 2011-08-09 |
| RE42588 | Control system for a two chamber gas discharge laser system | John P. Fallon, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara, John Meisner +4 more | 2011-08-02 |
| 7920616 | Laser system | Daniel J. W. Brown, William N. Partlo | 2011-04-05 |
| 7885309 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more | 2011-02-08 |