Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952797 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Udo Nothelfer | 2011-05-31 |
| RE42118 | Projection system for EUV lithography | Russell Hudyma, Udo Dinger | 2011-02-08 |