Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952797 | Reflective optical element and EUV lithography appliance | Hans-Jurgen Mann, Udo Nothelfer | 2011-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952797 | Reflective optical element and EUV lithography appliance | Hans-Jurgen Mann, Udo Nothelfer | 2011-05-31 |