Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977651 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2011-07-12 |
| RE42065 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2011-01-25 |
| 7871171 | Focusing-device for the radiation from a light source | Frank Melzer, Andreas Seifert, Wolfgang Singer | 2011-01-18 |