ND

Nils Dieckmann

CG Carl Zeiss Smt Gmbh: 1 patents #56 of 183Top 35%
📍 Wertingen, DE: #2 of 6 inventorsTop 35%
Overall (2011): #204,954 of 364,097Top 60%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8081293 Illumination system of a microlithographic projection exposure apparatus Damian Fiolka 2011-12-20