Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka, Roel De Jonge | 2011-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka, Roel De Jonge | 2011-04-19 |