Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045135 | Lithographic apparatus with a fluid combining unit and related device manufacturing method | Johannes Catharinus Hubertus Mulkens, Harry Sewell, Louis John Markoya | 2011-10-25 |
| 8027026 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more | 2011-09-27 |
| 7894040 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more | 2011-02-22 |