Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045135 | Lithographic apparatus with a fluid combining unit and related device manufacturing method | Johannes Catharinus Hubertus Mulkens, Matthew Lipson, Harry Sewell | 2011-10-25 |
| 7995185 | Systems and methods for thermally-induced aberration correction in immersion lithography | Harry Sewell, Diane McCafferty | 2011-08-09 |