Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072615 | Alignment method, alignment system, and product with alignment mark | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing, Xiuhong Wei | 2011-12-06 |
| 7944063 | Application of 2-dimensional photonic crystals in alignment devices | Richard Johannes Franciscus Van Haren | 2011-05-17 |
| 7863763 | Binary sinusoidal sub-wavelength gratings as alignment marks | Richard Johannes Franciscus Van Haren | 2011-01-04 |