Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049864 | Device manufacturing method and lithographic apparatus | Johannes Jacobus Matheus Baselmans, Marcus Adrianus Van De Kerkhof | 2011-11-01 |
| 8013977 | Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor | Arie Johan Van Der Sijs | 2011-09-06 |