Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049865 | Lithographic system, device manufacturing method, and mask optimization method | Wouter Frans Willem Mulckhuyse | 2011-11-01 |
| 8009270 | Uniform background radiation in maskless lithography | Paul Antoon Cyriel Desmedt, Minne Cuperus | 2011-08-30 |
| 8004652 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2011-08-23 |
| 7965373 | Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load | Martinus Hendricus Hoeks | 2011-06-21 |
| 7936445 | Altering pattern data based on measured optical element characteristics | Jason Hintersteiner, Wenceslao A. Cebuhar | 2011-05-03 |
| 7868998 | Lithographic apparatus | Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more | 2011-01-11 |
| 7864295 | Lithographic apparatus and device manufacturing method utilizing data filtering | Johannes Jacobus Matheus Baselmans | 2011-01-04 |