Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029973 | Lithographic method and carrier substrate | Wilhelmus Johannes Maria De Laat, Peter Theodorus Maria Giesen, Paulus Wilhelmus Leonardus Van Dijk, Erwin Rinaldo Meinders, Mária Péter | 2011-10-04 |
| 7911586 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Pieter Willem Herman De Jager | 2011-03-22 |
| 7879514 | Lithographic method and patterning device | Geoffrey Norman Phillipps, Rudy Jan Maria Pellens, Paulus Wilhelmus Leonardus Van Dijk | 2011-02-01 |