Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892903 | Device manufacturing method and substrate comprising multiple resist layers | — | 2011-02-22 |
| 7879514 | Lithographic method and patterning device | Geoffrey Norman Phillipps, Cheng-Qun Gui, Paulus Wilhelmus Leonardus Van Dijk | 2011-02-01 |