Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004770 | Pulse modifier with adjustable etendue | Adel Joobeur, Paul Van Der Veen, Arun Mahadevan Venkataraman | 2011-08-23 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2011-04-12 |
| 7898646 | Using an interferometer as a high speed variable attenuator | Justin Kreuzer, Henri Johannes Petrus Vink, Teunis Cornelis van den Dool, Daniel Pérez Calero | 2011-03-01 |