Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068212 | Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements | Marcus Adrianus Van De Kerkhof, M'hamed Akhssay, Mamoun El Ouasdad | 2011-11-29 |