Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018574 | Lithographic apparatus, radiation system and device manufacturing method | Robert Rafilevitch Gayazov, Vadim Yevgenyevich Banine, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili +1 more | 2011-09-13 |