Issued Patents 2003
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656830 | Dual damascene with silicon carbide middle etch stop layer/ARC | Ramkumar Subramanian, Fei Wang, Lynne A. Okada | 2003-12-02 |
| 6653190 | Flash memory with controlled wordline width | Jean Y. Yang, Kouros Ghandehari, Tazrien Kamal, Minh Van Ngo, Mark T. Ramsbey +2 more | 2003-11-25 |
| 6645853 | Interconnects with improved barrier layer adhesion | Minh Van Ngo | 2003-11-11 |
| 6642619 | System and method for adhesion improvement at an interface between fluorine doped silicon oxide and tantalum | Minh Van Ngo, Jeremy I. Martin | 2003-11-04 |
| 6613657 | BPSG, SA-CVD liner/P-HDP gap fill | Minh Van Ngo, Wenmei Li, Kelwin Ko, Kuo-Tung Chang, Tyagamohan Gottipati | 2003-09-02 |
| 6607925 | Hard mask removal process including isolation dielectric refill | Unsoon Kim, Yider Wu, Krishnashree Achuthan | 2003-08-19 |
| 6599839 | Plasma etch process for nonhomogenous film | Calvin T. Gabriel, Lynne A. Okada, Suzette K. Pangrle, Fei Wang | 2003-07-29 |
| 6576545 | Semiconductor devices with dual nature capping/ARC layers on fluorine doped silica glass inter-layer dielectrics and method of forming capping/ARC layers | Lu You, Minh Van Ngo | 2003-06-10 |
| 6576982 | Use of sion for preventing copper contamination of dielectric layer | Lu You, Minh Van Ngo | 2003-06-10 |
| 6566283 | Silane treatment of low dielectric constant materials in semiconductor device manufacturing | Suzette K. Pangrle, Minh Van Ngo, Lu You | 2003-05-20 |
| 6562416 | Method of forming low resistance vias | Minh Van Ngo, Robert A. Huertas | 2003-05-13 |
| 6530340 | Apparatus for manufacturing planar spin-on films | Lu You, Richard J. Huang | 2003-03-11 |
| 6528432 | H2-or H2/N2-plasma treatment to prevent organic ILD degradation | Minh Van Ngo, Robert A. Huertas | 2003-03-04 |
| 6518646 | Semiconductor device with variable composition low-k inter-layer dielectric and method of making | Suzette K. Pangrle, Calvin T. Gabriel, Richard J. Huang, Lu You | 2003-02-11 |