Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642619 | System and method for adhesion improvement at an interface between fluorine doped silicon oxide and tantalum | Minh Van Ngo, Dawn Hopper | 2003-11-04 |
| 6610594 | Locally increasing sidewall density by ion implantation | Eric M. Apelgren, Christian Zistl, Paul R. Besser, Fred Cheung | 2003-08-26 |
| 6600333 | Method and test structure for characterizing sidewall damage in a semiconductor device | Nicholas J. Kepler, Larry Zhao | 2003-07-29 |
| 6514844 | Sidewall treatment for low dielectric constant (low K) materials by ion implantation | Eric M. Apelgren, Christian Zistl, Paul R. Besser, Srikantewara Dakshina-Murthy, Jonathan B. Smith +2 more | 2003-02-04 |