Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610594 | Locally increasing sidewall density by ion implantation | Eric M. Apelgren, Jeremy I. Martin, Paul R. Besser, Fred Cheung | 2003-08-26 |
| 6514844 | Sidewall treatment for low dielectric constant (low K) materials by ion implantation | Jeremy I. Martin, Eric M. Apelgren, Paul R. Besser, Srikantewara Dakshina-Murthy, Jonathan B. Smith +2 more | 2003-02-04 |