Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660619 | Dual damascene metal interconnect structure with dielectric studs | Lynne A. Okada, Fei Wang | 2003-12-09 |
| 6656763 | Spin on polymers for organic memory devices | Jane V. Oglesby, Christopher F. Lyons, Ramkumar Subramanian, Angela T. Hui, Minh Van Ngo | 2003-12-02 |
| 6599839 | Plasma etch process for nonhomogenous film | Calvin T. Gabriel, Lynne A. Okada, Dawn Hopper, Fei Wang | 2003-07-29 |
| 6566283 | Silane treatment of low dielectric constant materials in semiconductor device manufacturing | Minh Van Ngo, Dawn Hopper, Lu You | 2003-05-20 |
| 6555461 | Method of forming low resistance barrier on low k interconnect | Christy Mei-Chu Woo, Minh Van Ngo | 2003-04-29 |
| 6518646 | Semiconductor device with variable composition low-k inter-layer dielectric and method of making | Dawn Hopper, Calvin T. Gabriel, Richard J. Huang, Lu You | 2003-02-11 |
| 6509267 | Method of forming low resistance barrier on low k interconnect with electrolessly plated copper seed layer | Christy Mei-Chu Woo, Connie P. Wang | 2003-01-21 |