Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653202 | Method of shallow trench isolation (STI) formation using amorphous carbon | Philip A. Fisher | 2003-11-25 |
| 6635943 | Method and system for reducing charge gain and charge loss in interlayer dielectric formation | Angela T. Hui, Tuan Pham, Mark T. Ramsbey, Lu You | 2003-10-21 |
| 6596631 | Method of forming copper interconnect capping layers with improved interface and adhesion | Minh Van Ngo, Hartmut Ruelke, Lothar Mergili, Joerg Hohage, Lu You +1 more | 2003-07-22 |
| 6559017 | Method of using amorphous carbon as spacer material in a disposable spacer process | David E. Brown, Philip A. Fisher, Richard Nguyen, Cyrus E. Tabery | 2003-05-06 |
| 6530340 | Apparatus for manufacturing planar spin-on films | Lu You, Dawn Hopper | 2003-03-11 |
| 6518646 | Semiconductor device with variable composition low-k inter-layer dielectric and method of making | Dawn Hopper, Suzette K. Pangrle, Calvin T. Gabriel, Lu You | 2003-02-11 |