Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664154 | Method of using amorphous carbon film as a sacrificial layer in replacement gate integration processes | Scott A. Bell, Srikanteswara Dakshina-Murthy, Cyrus E. Tabery | 2003-12-16 |
| 6653202 | Method of shallow trench isolation (STI) formation using amorphous carbon | Richard J. Huang | 2003-11-25 |
| 6624300 | Method for concentrating beta-glucan film | Richard C. Potter, Kirk Hash, John D. Neidt | 2003-09-23 |
| 6596553 | Method of pinhole decoration and detection | David Lin, Scott A. Bell, Srikanteswara Dakshina-Murthy | 2003-07-22 |
| 6559017 | Method of using amorphous carbon as spacer material in a disposable spacer process | David E. Brown, Richard J. Huang, Richard Nguyen, Cyrus E. Tabery | 2003-05-06 |
| 6534379 | Linerless shallow trench isolation method | Ming-Ren Lin, Matthew S. Buynoski | 2003-03-18 |
| 6524929 | Method for shallow trench isolation using passivation material for trench bottom liner | Qi Xiang | 2003-02-25 |
| 6521510 | Method for shallow trench isolation with removal of strained island edges | Darin A. Chan | 2003-02-18 |