Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664604 | Metal gate stack with etch stop layer | Paul R. Besser | 2003-12-16 |
| 6664154 | Method of using amorphous carbon film as a sacrificial layer in replacement gate integration processes | Scott A. Bell, Philip A. Fisher, Cyrus E. Tabery | 2003-12-16 |
| 6657268 | Metal gate stack with etch stop layer having implanted metal species | Paul R. Besser | 2003-12-02 |
| 6645797 | Method for forming fins in a FinFET device using sacrificial carbon layer | Matthew S. Buynoski, Cyrus E. Tabery, Haihong Wang, Chih-Yuh Yang, Bin Yu | 2003-11-11 |
| 6605514 | Planar finFET patterning using amorphous carbon | Cyrus E. Tabery, Scott A. Bell | 2003-08-12 |
| 6596553 | Method of pinhole decoration and detection | David Lin, Scott A. Bell, Philip A. Fisher | 2003-07-22 |
| 6589858 | Method of making metal gate stack with etch endpoint tracer layer | Paul R. Besser | 2003-07-08 |
| 6579801 | Method for enhancing shallow trench top corner rounding using endpoint control of nitride layer etch process with appropriate etch front | Christoph Schwan, Jeffrey C. Haines | 2003-06-17 |
| 6511911 | Metal gate stack with etch stop layer | Paul R. Besser | 2003-01-28 |