Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579801 | Method for enhancing shallow trench top corner rounding using endpoint control of nitride layer etch process with appropriate etch front | Srikanteswara Dakshina-Murthy, Jeffrey C. Haines | 2003-06-17 |