Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613688 | Semiconductor device and process for generating an etch pattern | Thomas M. Brown, Edward O. Travis | 2003-09-02 |
| 6579801 | Method for enhancing shallow trench top corner rounding using endpoint control of nitride layer etch process with appropriate etch front | Srikanteswara Dakshina-Murthy, Christoph Schwan | 2003-06-17 |