Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667212 | Alignment system for planar charge trapping dielectric memory cell lithography | Hidehiko Shiraiwa, Jean Y. Yang | 2003-12-23 |
| 6664030 | System for and method of constructing an alternating phase-shifting mask | Bruno M. LaFontaine, Bhanwar Singh | 2003-12-16 |
| 6653190 | Flash memory with controlled wordline width | Jean Y. Yang, Tazrien Kamal, Minh Van Ngo, Mark T. Ramsbey, Dawn Hopper +2 more | 2003-11-25 |
| 6645679 | Attenuated phase shift mask for use in EUV lithography and a method of making such a mask | Bruno La Fontaine, Calvin T. Gabriel, Harry J. Levinson | 2003-11-11 |
| 6642148 | RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresist | Emmanuil H. Lingunis, Mark S. Chang, Angela T. Hui, Scott A. Bell, Jusuke Ogura | 2003-11-04 |
| 6620717 | Memory with disposable ARC for wordline formation | Tazrien Kamal, Scott A. Bell, Mark T. Ramsbey, Jeffrey A. Shields, Jean Y. Yang | 2003-09-16 |
| 6589717 | Photon assisted deposition of hard mask formation for use in manufacture of both devices and masks | Bruno M. LaFontaine, Bhanwar Singh | 2003-07-08 |
| 6528398 | Thinning of trench and line or contact spacing by use of dual layer photoresist | Bhanwar Singh, Angela T. Hui | 2003-03-04 |