Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642148 | RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresist | Kouros Ghandehari, Emmanuil H. Lingunis, Mark S. Chang, Angela T. Hui, Scott A. Bell | 2003-11-04 |
| 6617215 | Memory wordline hard mask | Arvind Halliyal, Tazrien Kamal, Minh Van Ngo, Mark T. Ramsbey, Jeffrey A. Shields +3 more | 2003-09-09 |
| 6573140 | Process for making a dual bit memory device with isolated polysilicon floating gates | Kiyoshi Izumi, Masaru Yano, Hideki Komori, Tuan Pham, Angela T. Hui | 2003-06-03 |
| 6537866 | Method of forming narrow insulating spacers for use in reducing minimum component size | Jeffrey A. Shields, Tuan Pham, Bharath Rangarajan, Simon S. Chan | 2003-03-25 |