Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642148 | RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresist | Kouros Ghandehari, Mark S. Chang, Angela T. Hui, Scott A. Bell, Jusuke Ogura | 2003-11-04 |