Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670259 | Inert atom implantation method for SOI gettering | — | 2003-12-30 |
| 6642119 | Silicide MOSFET architecture and method of manufacture | Mario M. Pelella, Shankar Sinha | 2003-11-04 |
| 6624476 | Semiconductor-on-insulator (SOI) substrate having selective dopant implant in insulator layer and method of fabricating | Matthew S. Buynoski, Qi Xiang | 2003-09-23 |
| 6537866 | Method of forming narrow insulating spacers for use in reducing minimum component size | Jeffrey A. Shields, Tuan Pham, Jusuke Ogura, Bharath Rangarajan | 2003-03-25 |
| 6518173 | Method for avoiding fluorine contamination of copper interconnects | — | 2003-02-11 |