Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645679 | Attenuated phase shift mask for use in EUV lithography and a method of making such a mask | Calvin T. Gabriel, Harry J. Levinson, Kouros Ghandehari | 2003-11-11 |
| 6608321 | Differential wavelength inspection system | Harry J. Levinson, Jeffrey A. Schefske | 2003-08-19 |
| 6603543 | Inspection system with enhanced contrast | — | 2003-08-05 |
| 6555274 | Pupil filtering for a lithographic tool | Jongwook Kye | 2003-04-29 |
| 6556286 | Inspection system for the pupil of a lithographic tool | Harry J. Levinson, Jongwook Kye | 2003-04-29 |
| 6535280 | Phase-shift-moiré focus monitor | Jongwook Kye, Harry J. Levinson | 2003-03-18 |