Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646326 | Method and system for providing source/drain-gate spatial overlap engineering for low-power devices | Hyeon-Seag Kim | 2003-11-11 |
| 6602794 | Silylation process for forming contacts | — | 2003-08-05 |
| 6555274 | Pupil filtering for a lithographic tool | Bruno La Fontaine | 2003-04-29 |
| 6556286 | Inspection system for the pupil of a lithographic tool | Bruno La Fontaine, Harry J. Levinson | 2003-04-29 |
| 6535280 | Phase-shift-moiré focus monitor | Bruno La Fontaine, Harry J. Levinson | 2003-03-18 |