Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664030 | System for and method of constructing an alternating phase-shifting mask | Kouros Ghandehari, Bhanwar Singh | 2003-12-16 |
| 6593037 | EUV mask or reticle having reduced reflections | Calvin T. Gabriel, Harry J. Levinson | 2003-07-15 |
| 6589717 | Photon assisted deposition of hard mask formation for use in manufacture of both devices and masks | Kouros Ghandehari, Bhanwar Singh | 2003-07-08 |