Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8808959 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Hideo Hada, Yoshiyuki Utsumi, Akiya Kawaue | 2014-08-19 |
| 8765352 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Yoshiyuki Utsumi | 2014-07-01 |
| 8609320 | Resist composition, method of forming resist pattern, polymeric compound and compound | Yoshiyuki Utsumi, Tomoyuki Hirano, Daichi Takaki, Junichi Tsuchiya | 2013-12-17 |
| 8415082 | Resist composition, method of forming resist pattern, compound and method of producing the same, acid generator | Yoshiyuki Utsumi | 2013-04-09 |
| 8415085 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Hideo Hada, Yoshiyuki Utsumi, Akiya Kawaue | 2013-04-09 |
| 8367299 | Resist composition, method of forming resist pattern, compound and acid generator | Akiya Kawaue, Yoshiyuki Utsumi, Tsuyoshi Nakamura, Naoto Motoike, Hiroaki Shimizu +2 more | 2013-02-05 |
| 8338076 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Akiya Kawaue, Yoshiyuki Utsumi, Hideo Hada, Kensuke Matsuzawa, Keita Ishiduka +1 more | 2012-12-25 |
| 8298748 | Positive resist composition, method of forming resist pattern, and polymeric compound | Yoshiyuki Utsumi, Yoshitaka Komuro, Takeyoshi Mimura, Daichi Takaki | 2012-10-30 |
| 8252509 | Resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Hiroaki Shimizu, Naoto Motoike | 2012-08-28 |
| 8206890 | Resist composition, method of forming resist pattern, compound and acid generator | Akiya Kawaue, Yoshiyuki Utsumi, Tsuyoshi Nakamura, Naoto Motoike, Hiroaki Shimizu +2 more | 2012-06-26 |
| 8206891 | Positive resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Akiya Kawaue, Takahiro Dazai, Tomoyuki Hirano, Fumitake Kaneko +1 more | 2012-06-26 |
| 8124313 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Yoshiyuki Utsumi, Akiya Kawaue, Hideo Hada, Hiroaki Shimizu, Tsuyoshi Nakamura | 2012-02-28 |
| 8007981 | Resist composition and method of forming resist pattern | Ryoji Watanabe, Takeshi Iwai | 2011-08-30 |
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Yoshitaka Komuro, Keita Ishiduka, Akiya Kawaue, Kyoko Ohshita | 2011-06-07 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Akiya Kawaue, Takeshi Iwai, Hideo Hada, Shinichi Hidesaka, Tsuyoshi Kurosawa +4 more | 2011-04-19 |
| 7776510 | Resist composition, method of forming resist pattern, compound and acid generator | Takeshi Iwai, Hideo Hada, Keita Ishiduka, Akiya Kawaue, Hiroaki Shimizu +4 more | 2010-08-17 |
| 7745097 | Compound, manufacturing method thereof, acid generator, resist composition and method of forming resist pattern | Hideo Hada, Takeshi Iwai, Akiya Kawaue, Keita Ishiduka | 2010-06-29 |
| 7713679 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Keita Ishiduka, Yoshiyuki Utsumi, Akiya Kawaue, Hideo Hada | 2010-05-11 |
| 7682772 | Resist composition, method of forming resist pattern, novel compound, and acid generator | Yoshiyuki Utsumi, Akiya Kawaue, Hideo Hada, Hiroaki Shimizu, Tsuyoshi Nakamura | 2010-03-23 |
| 7488568 | Resist composition, method of forming resist pattern, compound and acid generator | Takeshi Iwai, Hideo Hada, Masaru Takeshita, Akiya Kawaue, Keita Ishiduka +6 more | 2009-02-10 |