Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899232 | Etching method | — | 2018-02-20 |
| 9881806 | Method of manufacturing a semiconductor device | Masanobu Honda, Kazuhiro Kubota, Hironobu Ichikawa | 2018-01-30 |
| 9735027 | Method for etching organic film | Chungjong Lee, Masanobu Honda | 2017-08-15 |
| 9460897 | Plasma etching method and plasma etching apparatus | — | 2016-10-04 |
| 9396962 | Etching method | Keiji Kitagaito, Masanobu Honda | 2016-07-19 |
| 9330930 | Plasma etching method and semiconductor device manufacturing method | Kazuhiro Kubota, Masanobu Honda | 2016-05-03 |
| 9318340 | Method of manufacturing a semiconductor device | Masanobu Honda, Kazuhiro Kubota, Hironobu Ichikawa | 2016-04-19 |
| 9147580 | Plasma etching method and plasma processing apparatus | Masanobu Honda, Hironobu Ichikawa, Jin Kudo | 2015-09-29 |
| 9087676 | Plasma processing method and plasma processing apparatus | Masanobu Honda, Hironobu Ichikawa | 2015-07-21 |
| 9048178 | Plasma etching method and semiconductor device manufacturing method | Kazuhiro Kubota, Masanobu Honda | 2015-06-02 |
| 8735299 | Semiconductor device manufacturing method and computer-readable storage medium | Seiichi Watanabe, Manabu Sato, Kazuki Narishige, Takanori Sato | 2014-05-27 |
| 8703002 | Plasma processing apparatus, plasma processing method and storage medium | Tatsuo Matsudo, Shinji Himori, Noriaki Imai, Takeshi Ohse, Jun Abe | 2014-04-22 |
| 7189653 | Etching method and etching apparatus | — | 2007-03-13 |