Issued Patents All Time
Showing 51–75 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8608121 | Device and method for fixing a reactor metering pipe | Takeshi Maehara, Hideshi Iwasa, Yuusuke Watanabe, Kunihiko Kinugasa, Hajime Mori +5 more | 2013-12-17 |
| 8440939 | Annealing device | Tomohiro Suzuki, Sumi Tanaka, Masatake Yoneda, Hiroyuki Miyashita | 2013-05-14 |
| 8419960 | Plasma processing apparatus and method | Ikuo Sawada, Songyun Kang | 2013-04-16 |
| 8308898 | Tuner and microwave plasma source | Taro Ikeda, Yuki Osada | 2012-11-13 |
| 8299671 | Processing apparatus | Masamichi Nomura, Kenjiro Koizumi | 2012-10-30 |
| 8246900 | Annealing apparatus | Hiroyuki Miyashita, Masatake Yoneda, Tomohiro Suzuki, Sumi Tanaka, Masamichi Nomura +1 more | 2012-08-21 |
| 8163128 | Plasma processing apparatus | Yuki Osada, Takashi Ogino | 2012-04-24 |
| 8128751 | Film-forming apparatus | Takashi Kakegawa | 2012-03-06 |
| 8110045 | Processing equipment for object to be processed | Masatake Yoneda, Masahiro Shimizu | 2012-02-07 |
| 8107801 | Heat treatment apparatus, computer program, and storage medium | Masahiro Shimizu, Masatake Yoneda | 2012-01-31 |
| 8041197 | Heating apparatus, heat treatment apparatus, computer program and storage medium | Tomohiro Suzuki | 2011-10-18 |
| 8005352 | Heat treating device | — | 2011-08-23 |
| 7978963 | Thermal processing apparatus | Masahiro Shimizu, Masatake Yoneda | 2011-07-12 |
| 7915827 | Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium | Yuki Osada | 2011-03-29 |
| 7854962 | Gas supply method using a gas supply system | Sum Tanaka, Tetsuya Saito, Norihiko Yamamoto, Kenichi Yanagitani | 2010-12-21 |
| 7846255 | Processing equipment for object to be processed | Masatake Yoneda, Masahiro Shimizu | 2010-12-07 |
| 7768163 | Motor | — | 2010-08-03 |
| 7675207 | Motor device | — | 2010-03-09 |
| 7661386 | Film forming device | Takashi Kakegawa | 2010-02-16 |
| 7445690 | Plasma processing apparatus | Yuki Osada, Takashi Ogino | 2008-11-04 |
| 7430985 | Plasma processing equipment | — | 2008-10-07 |
| 7372350 | Electromagnetic relay | Yoshifumi Chida, Kei Chiba, Tatsumi Ide | 2008-05-13 |
| 7355379 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Takashi Ogino, Yuki Osada | 2008-04-08 |
| 7226524 | Plasma processing apparatus | Nobuhiko Yamamoto, Hikaru Adachi, Yuki Osada | 2007-06-05 |
| 7176634 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Takashi Ogino, Yuki Osada | 2007-02-13 |