Issued Patents All Time
Showing 76–90 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977359 | Method and device for vacuum treatment | — | 2005-12-20 |
| 6950596 | Variable optical attenuator | Akira Yahagi, Tatsumi Ide, Michikazu Kondo | 2005-09-27 |
| 6856211 | Coaxial type impedance matching device | Fumio Yamada, Toshiaki Kitamura, Hiroyuki Kobayashi, Koichi Rokuyama, Akihiro Kubota +2 more | 2005-02-15 |
| 6819052 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Takashi Ogino, Yuki Osada | 2004-11-16 |
| 6759633 | Heat treating device | Masato Kubodera, Masaki Sohma, Katsumi Sekiguchi | 2004-07-06 |
| 6627859 | Method and apparatus for temperature control of heater | Naoto Ikeda | 2003-09-30 |
| 6530687 | Temperature measuring system | Tomohiro Suzuki, Masahiro Shimizu, Minoru Yazawa | 2003-03-11 |
| 6483395 | Micro-machine (MEMS) switch with electrical insulator | Kenichirou Suzuki, Yoshinori Ota, Tatsumi Ide | 2002-11-19 |
| 6436193 | Gas processing apparatus baffle member, and gas processing method | Teruo Iwata, Taro Komiya, Tomihiro Yonenaga | 2002-08-20 |
| 6092299 | Vacuum processing apparatus | Koichi Yamazaki | 2000-07-25 |
| 5880437 | Automatic control system and method using same | Hiroyuki Miyashita | 1999-03-09 |
| 5783884 | Coil components and motor using the coil components | Makoto Fujishima, Noriyuki Kawahara | 1998-07-21 |
| 5448147 | Selectable feedback control system | — | 1995-09-05 |
| 5445675 | Semiconductor processing apparatus | Masao Kubodera, Hatsuo Osada | 1995-08-29 |
| 5057725 | Rotary electric machine | Susumu Kobayashi, Makoto Fujishima | 1991-10-15 |