Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7075037 | Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer | Masahiro Shimizu | 2006-07-11 |
| 6530687 | Temperature measuring system | Tomohiro Suzuki, Shigeru Kasai, Masahiro Shimizu | 2003-03-11 |
| 6283630 | Temperature measuring method using radiation thermometer | — | 2001-09-04 |
| 6262397 | Heat treatment apparatus and heat treatment method | — | 2001-07-17 |