SH

Shun-Liang Hsu

TSMC: 46 patents #715 of 12,232Top 6%
UM United Microelectronics: 1 patents #2,686 of 4,560Top 60%
Overall (All Time): #61,113 of 4,157,543Top 2%
47
Patents All Time

Issued Patents All Time

Showing 26–47 of 47 patents

Patent #TitleCo-InventorsDate
5972777 Method of forming isolation by nitrogen implant to reduce bird's beak Chia-Ta Hsieh 1999-10-26
5895257 LOCOS field oxide and field oxide process using silicon nitride spacers Chaochieh Tsai, Yuan-Chang Huang, Juing-Yi Wu 1999-04-20
5872042 Method for alignment mark regeneration Syun-Ming Jang, Chang-Song Lin 1999-02-16
5866947 Post tungsten etch bank anneal, to improve aluminum step coverage Jyh-Haur Wang 1999-02-02
5858854 Method for forming high contrast alignment marks Chao-Chieh Tsai, Tsu Shih 1999-01-12
5804488 Method of forming a tungsten silicide capacitor having a high breakdown voltage Chun-Yi Shih, Jyh-Kang Ting 1998-09-08
5757045 CMOS device structure with reduced risk of salicide bridging and reduced resistance via use of a ultra shallow, junction extension, ion implantation Chaochieh Tsai 1998-05-26
5726091 Method of reducing bird's beak of field oxide using reoxidized nitrided pad oxide layer Chao-Chieh Tsai 1998-03-10
5705320 Recovery of alignment marks and laser marks after chemical-mechanical-polishing Shih-Shiung Chen 1998-01-06
5702972 Method of fabricating MOSFET devices Chaochieh Tsai, Shaulin Shue 1997-12-30
5691212 MOS device structure and integration method Chaochieh Tsai 1997-11-25
5668024 CMOS device structure with reduced risk of salicide bridging and reduced resistance via use of a ultra shallow, junction extension, ion implantation process Chaochieh Tsai 1997-09-16
5641710 Post tungsten etch back anneal, to improve aluminum step coverage Jyh-Haur Wang 1997-06-24
5597442 Chemical/mechanical planarization (CMP) endpoint method using measurement of polishing pad temperature Hsi-Chieh Chen 1997-01-28
5554558 Method of making high precision w-polycide-to-poly capacitors in digital/analog process Jyh-Kang Ting, Chun-Yi Shih 1996-09-10
5530418 Method for shielding polysilicon resistors from hydrogen intrusion Han-Liang Tseng, Mou-Shiung Lin 1996-06-25
5510637 Fabrication of w-polycide-to-poly capacitors with high linearity Mou-Shiung Lin, Ming Lei 1996-04-23
5480828 Differential gate oxide process by depressing or enhancing oxidation rate for mixed 3/5 V CMOS process Jyh-Min Tsaur, Mou-Shing Lin, Jyh-Kang Ting 1996-01-02
5460993 Method of making NMOS and PMOS LDD transistors utilizing thinned sidewall spacers Shyh-Chyi Wong 1995-10-24
5451529 Method of making a real time ion implantation metal silicide monitor Chun-Yi Shih 1995-09-19
5338701 Method for fabrication of w-polycide-to-poly capacitors with high linearity Chun-Yi Shi, Mou-Shiung Lin 1994-08-16
5108937 Method of making a recessed gate MOSFET device structure Yu-Hsein Tsai 1992-04-28