Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Steven C. Shannon, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +4 more | 2003-12-23 |
| 6652712 | Inductive antenna for a plasma reactor producing reduced fluorine dissociation | Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino, David Brian McParland +3 more | 2003-11-25 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2003-07-01 |
| 6201208 | Method and apparatus for plasma processing with control of ion energy distribution at the substrates | Amy Wendt | 2001-03-13 |