Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8140292 | Method and system for controlling a voltage waveform | — | 2012-03-20 |
| 6201208 | Method and apparatus for plasma processing with control of ion energy distribution at the substrates | Shiang-Bau Wang | 2001-03-13 |