Issued Patents All Time
Showing 26–50 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6016109 | Mobile unit support system | Takasi Yosida, Joji Kane | 2000-01-18 |
| 5950101 | Method for manufacturing a semiconductor device involving forming two silicon oxide layers by CVD and forming HMDS between the silicon oxide layers | Kousaka Yano, Tatsuo Sugiyama, Satoshi Ueda | 1999-09-07 |
| 5863338 | Apparatus and method for forming thin film | Yuichiro Yamada, Naoki Suzuki, Ryuzo Houchin, Kousaku Yano, Yuka Terai | 1999-01-26 |
| 5753066 | Plasma source for etching | Masafumi Kubota, Tokuhiko Tamaki | 1998-05-19 |
| 5753536 | Semiconductor device and associated fabrication method | Tatsuo Sugiyama, Shuji Hirao, Kousaku Yano | 1998-05-19 |
| 5723909 | Semiconductor device and associated fabrication method | Kousaku Yano, Tatsuo Sugiyama, Satoshi Ueda | 1998-03-03 |
| 5593539 | Plasma source for etching | Masafumi Kubota, Tokuhiko Tamaki | 1997-01-14 |
| 5576247 | Thin layer forming method wherein hydrophobic molecular layers preventing a BPSG layer from absorbing moisture | Kousaku Yano, Masayuki Endo, Yuka Terai, Tomoyasu Murakami, Tetsuya Ueda +1 more | 1996-11-19 |
| 5569628 | Semiconductor device fabrication method | Kousaku Yano, Tomoyasu Murakami, Masayuki Endo | 1996-10-29 |
| 5527662 | Process for forming fine pattern | Kazuhiko Hashimoto | 1996-06-18 |
| 5501739 | Apparatus and method for forming thin film | Yuichiro Yamada, Naoki Suzuki, Ryuzo Houchin, Kousaku Yano, Yuka Terai | 1996-03-26 |
| 5472826 | Semiconductor device fabrication method | Masayuki Endo, Teruhito Ohnishi | 1995-12-05 |
| 5436424 | Plasma generating method and apparatus for generating rotating electrons in the plasma | Ichiro Nakayama, Tokuhiko Tamaki, Mitsuhiro Okuni, Masafumi Kubota | 1995-07-25 |
| 5424905 | Plasma generating method and apparatus | Kenji Harafuji, Masafumi Kubota, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Ichiro Nakayama | 1995-06-13 |
| 5421934 | Dry-etching process simulator | Akio Misaka, Kenji Harafugi, Masafumi Kubbota | 1995-06-06 |
| 5404079 | Plasma generating apparatus | Mitsuhiro Ohkuni, Masafumi Kubota, Ichiro Nakayama, Tokuhiko Tamaki | 1995-04-04 |
| 5385867 | Method for forming a multi-layer metallic wiring structure | Tetsuya Ueda, Kousaku Yano, Tomoyasu Murakami, Michinari Yamanaka, Shuji Hirao | 1995-01-31 |
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Kenji Harafuji, Mitsuhiro Ohkuni, Tokuhiko Tamaki, Masafumi Kubota | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Kenji Harafuji, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Ichiro Nakayama | 1994-07-26 |
| 5330606 | Plasma source for etching | Masafumi Kubota, Tokuhiko Tamaki | 1994-07-19 |
| 5312776 | Method of preventing the corrosion of metallic wirings | Tomoyasu Murakami, Michinari Yamanaka, Kousaku Yano, Masayuki Endo, Staoshi Ueda +3 more | 1994-05-17 |
| 5306601 | Fine pattern forming material and pattern forming method | Kazuhiko Hashimoto, Taichi Koizumi, Kenji Kawakita | 1994-04-26 |
| 5259922 | Drying etching method | Atsuhiro Yamano, Tokuhiko Tamaki, Masafumi Kubota, Kenji Harafuji | 1993-11-09 |
| 5252414 | Evaluation method of resist coating | Kazuhiro Yamashita, Hironao Iwai | 1993-10-12 |
| 5252430 | Fine pattern forming method | Kazuhiko Hashimoto | 1993-10-12 |