Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6278171 | Sublithographic fuses using a phase shift mask | Kenneth C. Arndt, Louis L. Hsu, Jack A. Mandelman | 2001-08-21 |
| 6252284 | Planarized silicon fin device | Edward J. Nowak, Hon-Sum Philip Wong | 2001-06-26 |
| 6190986 | Method of producing sulithographic fuses using a phase shift mask | Kenneth C. Arndt, Louis L. Hsu, Jack A. Mandelman | 2001-02-20 |
| 6140833 | In-situ measurement method and apparatus for semiconductor processing | Bertrand Flietner | 2000-10-31 |
| 6124141 | Non-destructive method and device for measuring the depth of a buried interface | Venkatachalam C. Jaiprakash | 2000-09-26 |
| 5956142 | Method of end point detection using a sinusoidal interference signal for a wet etch process | Klaus Penner | 1999-09-21 |
| 5891807 | Formation of a bottle shaped trench | Rajiv Ranade, Stefan Schmitz | 1999-04-06 |
| 5877061 | Methods for roughening and volume expansion of trench sidewalls to form high capacitance trench cell for high density dram applications | Scott D. Halle, ChorngLii Hwang | 1999-03-02 |
| 5674409 | Nanolithographic method of forming fine lines | — | 1997-10-07 |
| 5312717 | Residue free vertical pattern transfer with top surface imaging resists | Harbans S. Sachdev, John C. Forster, Leo L. Linehan, Scott A. MacDonald, Walter E. Mlynko +1 more | 1994-05-17 |