Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012670 | Photoresist systems | Cheng-Bai Xu | 2011-09-06 |
| 7220486 | Photoresist compositions | Gary Ganghui Teng | 2007-05-22 |
| 7202009 | Polymers and photoresist compositions for short wavelength imaging | Peter Trefonas, III, Charles R. Szmanda | 2007-04-10 |
| 7132214 | Polymers and photoresist compositions for short wavelength imaging | Robert L. Brainard, Shintaro Yamada | 2006-11-07 |
| 7019092 | Fluorinated copolymers for microlithography | Andrew Edward Feiring, Frank Leonard Schadt, III | 2006-03-28 |
| 6884564 | Fluorinated polymers having ester groups and photoresists for microlithography | Andrew Edward Feiring, Jerald Feldman, Frank Leonard Schadt, III | 2005-04-26 |
| 6858379 | Photoresist compositions for short wavelength imaging | Anthony Zampini, Charles R. Szmanda, James F. Cameron, Gerhard Pohlers | 2005-02-22 |
| 6852466 | Photoresist compositions particularly suitable for short wavelength imaging | Peter Trefonas, III | 2005-02-08 |
| 6749983 | Polymers and photoresist compositions | Charles R. Szmanda | 2004-06-15 |
| 6749986 | Polymers and photoresist compositions for short wavelength imaging | Charles R. Szmanda | 2004-06-15 |
| 6379861 | Polymers and photoresist compositions comprising same | Peter Trefonas, III, George G. Barclay | 2002-04-30 |
| 6165674 | Polymers and photoresist compositions for short wavelength imaging | George G. Barclay, Charles R. Szmanda | 2000-12-26 |
| 6136501 | Polymers and photoresist compositions comprising same | Peter Trefonas, III, George G. Barclay | 2000-10-24 |
| 6057083 | Polymers and photoresist compositions | Charles R. Szmanda | 2000-05-02 |
| 5876899 | Photoresist compositions | Charles R. Szmanda, Robert L. Brainard, Manuel DoCanto | 1999-03-02 |
| 5750312 | Process for fabricating a device | Edwin Arthur Chandross, Omkaram Nalamasu, Elsa Reichmanis, Larry F. Thompson | 1998-05-12 |
| 5736424 | Device fabrication involving planarization | Judith Ann Prybyla | 1998-04-07 |
| 5550007 | Surface-imaging technique for lithographic processes for device fabrication | David R. Wheeler | 1996-08-27 |
| 5508144 | Process for fabricating a device | Howard Edan Katz | 1996-04-16 |
| 5487967 | Surface-imaging technique for lithographic processes for device fabrication | Richard S. Hutton, David R. Wheeler | 1996-01-30 |
| 5215867 | Method with gas functionalized plasma developed layer | Larry E. Stillwagon, Thirumalai Venkatesan, Thomas Wolf | 1993-06-01 |
| 5212047 | Resist material and process for use | Walter R. Hertler, Dotsevi Y. Sogah | 1993-05-18 |
| 5206317 | Resist material and process for use | Walter R. Hertler, Dotsevi Y. Sogah | 1993-04-27 |
| 4981770 | Process for fabrication of device | — | 1991-01-01 |
| 4683024 | Device fabrication method using spin-on glass resins | David A. B. Miller, Joseph M. Moran | 1987-07-28 |